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Use of SU-8 photoresist for very high aspect ratio x-ray lithography
by
Bogdanov, A.L.
,
Peredkov, S.S.
Published in
Microelectronic engineering
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Concept, construction and commissioning of an alignment system for deep X-ray lithography
by
Wilhelmi, O.
,
Peredkov, S.S.
,
Bogdanov, A.L.
Published in
Microelectronic engineering
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Spectrometer with vertical dispersion mode for studying chemical shifts in X-ray emission lines with the use of synchrotron radiation: preliminary experiment
by
Artemiev, A.N
,
Peredkov, S.S
,
Rakhimbabaev, T.Y
,
Zabelin, A.V
,
Hrdy, J
Published in
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment
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A Deep X-ray Lithography beamline at the Kurchatov Synchrotron Radiation Source: First results
by
Artemiev, A.N.
,
Bushev, I.N.
,
Kolyasnikov, V.A.
,
Kovachov, G.A.
,
Latish, O.E.
,
Martynenko, V.V.
,
Moryakov, V.P.
,
Nikitin, B.I.
,
Odintsov, D.G.
,
Peredkov, S.S.
,
Rakhimbabaev, T.Y.
,
Stankevitch, V.G.
,
Tzvid, E.S.
,
Schmidt, M.
,
Schmidt, A.
,
Feiertag, G.
Published in
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment
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