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Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm
by
Phan, Nhue Nguyen
,
Le, Hai Hoang
,
Duong, Dung Chi
Published in
Optical engineering
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Measurement of nanoscale displacements using a Mirau white-light interference microscope and an inclined flat surface
by
Phan, Nhue Nguyen
,
Le, Hai Hoang
,
Duong, Dung Chi
,
Ta, Duong Van
Published in
Optical engineering
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Optical Engineering
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Subjects
Optics
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Physical Sciences
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Science & Technology
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White-Light Interference
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Interferogram Analysis
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Nano-Displacement
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Optical Metrology
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Sphere Radius Measurement
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Three-Dimensional Surface Topography
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Spie Digital Library Journals
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Science Citation Index Expanded (Web Of Science)
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