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Extreme ultraviolet mask roughness effects in high numerical aperture lithography
by
Naulleau, Patrick
,
Wang, Yow-Gwo
,
Pistor, Tom
Published in
Applied optics (2004)
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Extreme ultraviolet mask defect simulation: Low-profile defects
by
Pistor, Tom
,
Deng, Yunfei
,
Neureuther, Andrew
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Extreme ultraviolet mask defect simulation
by
Pistor, Tom
,
Neureuther, Andrew
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Effects of multilayer mask roughness on extreme ultraviolet lithography
by
Deng, Yunfei
,
Pistor, Tom
,
Neureuther, Andrew R.
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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A scuticociliate causes mass mortality of Diadema antillarum in the Caribbean Sea
by
Hewson, Ian
,
Ritchie, Isabella T
,
Evans, James S
,
Altera, Ashley
,
Behringer, Donald
,
Bowman, Erin
,
Brandt, Marilyn
,
Budd, Kayla A
,
Camacho, Ruleo A
,
Cornwell, Tomas O
,
Countway, Peter D
,
Croquer, Aldo
,
Delgado, Gabriel A
,
DeRito, Christopher
,
Duermit-Moreau, Elizabeth
,
Francis-Floyd, Ruth
,
Gittens, Jr, Samuel
,
Henderson, Leslie
,
Hylkema, Alwin
,
Kellogg, Christina A
,
Kiryu, Yasunari
,
Kitson-Walters, Kimani A
,
Kramer, Patricia
,
Lang, Judith C
,
Lessios, Harilaos
,
Liddy, Lauren
,
Marancik, David
,
Nimrod, Stephen
,
Patterson, Joshua T
,
Pistor, Marit
,
Romero, Isabel C
,
Sellares-Blasco, Rita
,
Sevier, Moriah L B
,
Sharp, William C
,
Souza, Matthew
,
Valdez-Trinidad, Andreina
,
van der Laan, Marijn
,
Vilanova-Cuevas, Brayan
,
Villalpando, Maria
,
Von Hoene, Sarah D
,
Warham, Matthew
,
Wijers, Tom
,
Williams, Stacey M
,
Work, Thierry M
,
Yanong, Roy P
,
Zambrano, Someira
,
Zimmermann, Alizee
,
Breitbart, Mya
Published in
Science advances
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The role of law and legal institutions in Asian economic development, 1960-1995
by
Pistor, Katharina
,
Wellons, Philip A
,
Ginsburg, Tom
Published in
Law & society review
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