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Gas Sensitivity of IBSD Deposited TiO2 Thin Films
by
Almaev, Aleksei V.
,
Yakovlev, Nikita N.
,
Kushnarev, Bogdan O.
,
Kopyev, Viktor V.
,
Novikov, Vadim A.
,
Zinoviev, Mikhail M.
,
Yudin, Nikolay N.
,
Podzivalov, Sergey N.
,
Erzakova, Nadezhda N.
,
Chikiryaka, Andrei V.
,
Shcheglov, Mikhail P.
,
Baalbaki, Houssain
,
Olshukov, Alexey S.
Published in
Coatings (Basel)
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Gas Sensitivity of IBSD Deposited TiO[sub.2] Thin Films
by
Almaev, Aleksei V
,
Yakovlev, Nikita N
,
Kushnarev, Bogdan O
,
Kopyev, Viktor V
,
Novikov, Vadim A
,
Zinoviev, Mikhail M
,
Yudin, Nikolay N
,
Podzivalov, Sergey N
,
Erzakova, Nadezhda N
,
Chikiryaka, Andrei V
,
Shcheglov, Mikhail P
,
Baalbaki, Houssain
,
Olshukov, Alexey S
Published in
Coatings (Basel)
Get full text
Article
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Coatings
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Subjects
Thin Films
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Titanium Dioxide
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Annealing
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Coating Processes
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Composition
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Dielectric Films
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Film Thickness
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Gas Sensor
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Gases
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Ion Beam Assisted Deposition
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Ion Beam Sputter Deposition
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Ion Beam Sputtering
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Ion Beams
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Materials Science
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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Metal Oxides
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Methods
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Morphology
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Nitrogen Dioxide
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