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Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source
by
Qerimi, Dren
,
Herschberg, Andrew C.
,
Panici, Gianluca
,
Hays, Parker
,
Pohlman, Tyler
,
Ruzic, David N.
Published in
Journal of applied physics
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Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source
by
Qerimi, Dren
,
Herschberg, Andrew C.
,
Panici, Gianluca
,
Hays, Parker
,
Pohlman, Tyler
,
Ruzic, David N.
Published in
Journal of applied physics
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Prior Therapy with Rituximab (R) in Patients (pts) with Diffuse Large B-Cell Lymphoma (DLBCL) Does Not Affect Disease-Free (DFS) or Overall Survival (OS) Following High Dose Therap...
by
Thakkar, Snehal G.
,
Sweetenham, John William
,
Rybicki, Lisa
,
Sobecks, Ronald
,
Andresen, Steven
,
Dean, Robert M.
,
Pohlman, Brad
,
Kang, Tyler Y.
,
Kalaycio, Matt
,
Brown, Stacey
,
Bolwell, Brian J.
Published in
Blood
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Prior Therapy with Rituximab (R) in Patients with Follicular Lymphoma (FL) Does Not Affect Relapse-Free (RFS) or Overall Survival (OS) after High Dose Therapy (HDT) and Autologous...
by
Kang, Tyler Y.
,
Sweetenham, John William
,
Thakkar, Snehal G.
,
Rybicki, Lisa A.
,
Brown, Stacey
,
Dean, Robert
,
Sekeres, Mikkael A.
,
Advani, Anjali
,
Sobecks, Ronald
,
Kalaycio, Matt
,
Pohlman, Brad
,
Bolwell, Brian J.
Published in
Blood
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Blood
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Journal Of Applied Physics
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Physics
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Surface Waves
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70 Plasma Physics And Fusion Technology
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Antennas
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Applied Physics
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Chemical Elements
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Contamination
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Downtime
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Electron Energy
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Etching
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Extreme Ultraviolet Lithography
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Hydrogen Plasma
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Mechanical Instruments
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Optical Sources
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Physical Sciences
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Physics, Applied
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Plasma
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Plasma Antennas
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Plasma Material Interactions
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