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Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
by
Pointet, John
,
Gonon, Patrice
,
Latu-Romain, Lawrence
,
Bsiesy, Ahmad
,
Vallée, Christophe
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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(Invited) Metal-Insulator-Metal Devices with High-K Dielectric for Nonvolatile or Dynamic Random Access Memories
by
Bsiesy, Ahmad
,
Gonon, Patrice
,
Vallée, Christophe
,
Pointet, John
,
Mannequin, Cédric
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ECS transactions
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Rutile-structured TiO{sub 2} deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
by
Pointet, John
,
Gonon, Patrice
,
Latu-Romain, Lawrence
,
Bsiesy, Ahmad
,
Vallée, Christophe
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Nouveaux Travaux Pratiques d’Elaboration et de Caractérisation de cellules de mémoires résistives de type OxRAM
by
Bonvalot, Marceline
,
Constantin, Delphine
,
Pointet, John
,
Bsiesy, Ahmad
Published in
Journal sur l'enseignement des sciences et technologies de l'information et des systèmes
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