Search Results - Poitevin, J.M.

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  1. 1
    Influence of the nitrogen partial pressure on the properties of d.c.-sputtered titanium and titanium nitride films

    Influence of the nitrogen partial pressure on the properties of d.c.-sputtered titanium and titanium nitride films by Lemperière, G., Poitevin, J.M.

    Published in Thin solid films
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  2. 2
    Structure of TiN films deposited on heated and negatively biased silicon substrates

    Structure of TiN films deposited on heated and negatively biased silicon substrates by Mahéo, D., Poitevin, J.M.

    Published in Thin solid films
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  3. 3
    Influence of substrate bias on the composition, structure and electrical properties of reactively d.c.-sputtered TiN films

    Influence of substrate bias on the composition, structure and electrical properties of reactively d.c.-sputtered TiN films by Poitevin, J.M., Lemperiere, G., Tardy, J.

    Published in Thin solid films
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  4. 4
    Mechanisms of the biased sputtering of titanium in an ArN 2 mixture

    Mechanisms of the biased sputtering of titanium in an ArN 2 mixture by Poitevin, J.M., Lempérière, G.

    Published in Thin solid films
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  5. 5
    Thermal stability of TiN films deposited onto silicon substrates

    Thermal stability of TiN films deposited onto silicon substrates by Poitevin, J.M., Maheo, D., Lemperiere, G.

    Published in Thin solid films
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  6. 6
    Mechanisms of the biased sputtering of titanium in an Ar-N2 mixture

    Mechanisms of the biased sputtering of titanium in an Ar-N2 mixture by POITEVIN, J. M, LEMPERIERE, G

    Published in Thin solid films
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  7. 7
    Densite des metastables d'argon dans une decharge de pulverisation

    Densite des metastables d'argon dans une decharge de pulverisation by Fourrier, C., Lemperiere, G., Poitevin, J.M.

    Published in Physics letters. A
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  8. 8
    Production et distribution en energie d'atomes d'hydrogene a l'etat de traces dans une decharge de pulverisation

    Production et distribution en energie d'atomes d'hydrogene a l'etat de traces dans une decharge de pulverisation by Fourrier, C, Lemperiere, G, Poitevin, J.M

    Published in Physics letters. A
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