Search Results - Poon, Chyiu Hyia

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  1. 1
    Effect of Fluorine Co-Implant on Boron Diffusion in Germanium Preamorphized Silicon During Post-LSA Rapid Thermal Annealing

    Effect of Fluorine Co-Implant on Boron Diffusion in Germanium Preamorphized Silicon During Post-LSA Rapid Thermal Annealing by Chyiu Hyia Poon, See, Alex

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  2. 2
    Suppression of boron deactivation and diffusion in preamorphized silicon after nonmelt laser annealing by carbon co-implantation

    Suppression of boron deactivation and diffusion in preamorphized silicon after nonmelt laser annealing by carbon co-implantation by Poon, Chyiu Hyia, See, Alex, Tan, Yunling, Zhou, Meisheng, Gui, Dong

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  3. 3
    Alternating Reversed Scanning Sequence for Improved Within-Wafer Uniformity During Nonmelt Laser Annealing of Arsenic-Implanted Silicon

    Alternating Reversed Scanning Sequence for Improved Within-Wafer Uniformity During Nonmelt Laser Annealing of Arsenic-Implanted Silicon by Chyiu Hyia Poon, See, Alex, Mei Sheng Zhou

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  4. 4
    Dopant Loss Mechanism in n[sup +]∕p Germanium Junctions during Rapid Thermal Annealing

    Dopant Loss Mechanism in n[sup +]∕p Germanium Junctions during Rapid Thermal Annealing by Poon, Chyiu Hyia, Tan, Leng Seow, Cho, Byung Jin, Du, An Yan

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  5. 5
    Deactivation Induced Within Wafer Nonuniformity During Nonmelt Laser Annealing of Arsenic and Phosphorus Implanted Silicon

    Deactivation Induced Within Wafer Nonuniformity During Nonmelt Laser Annealing of Arsenic and Phosphorus Implanted Silicon by Poon, C.H., See, A., Meisheng Zhou, Wong, C.W.

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  6. 6
    Boron profile narrowing in laser-processed silicon after rapid thermal anneal

    Boron profile narrowing in laser-processed silicon after rapid thermal anneal by CHYIU HYIA POON, LENG SEOW TAN, BYUNG JIN CHO, SEE, Alex, BHAT, Mousumi

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  7. 7
    Improved Boron Activation with Reduced Preheating Temperature during Flash Annealing of Preamorphized Silicon

    Improved Boron Activation with Reduced Preheating Temperature during Flash Annealing of Preamorphized Silicon by Poon, Chyiu Hyia, See, Alex, Tan, Yunling, Zhou, Meisheng, Gui, Dong

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  8. 8
    Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation

    Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation by Poon, Chyiu Hyia, Cho, Byung Jin, Lu, Yong Feng, Bhat, Mousumi, See, Alex

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  9. 9
    Electrical evaluation of laser annealed junctions by Hall measurements

    Electrical evaluation of laser annealed junctions by Hall measurements by Poon, Chyiu Hyia, Tan, Leng Seow, Cho, Byung Jin, Ng, Keh Ting, Bhat, Mousumi, Chan, Lap

    Published in Thin solid films
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  10. 10
    Electrical evaluation of laser annealed junctions by Hall measurements

    Electrical evaluation of laser annealed junctions by Hall measurements by CHYIU HYIA POON, LENG SEOW TAN, BYUNG JIN CHO, KEH TING NG, BHAT, Mousumi, CHAN, Lap

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    Conference Proceeding
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  11. 11
    Effect of Germanium Preamorphization Implant on Boron Deactivation in Silicon Following Multiple-Pulse Flash Annealing

    Effect of Germanium Preamorphization Implant on Boron Deactivation in Silicon Following Multiple-Pulse Flash Annealing by Poon, Chyiu Hyia, See, Alex, Tan, Yunling, Zhou, Meisheng, Gui, Dong

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