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    Real-time observation of self-limiting SiO2/Si decomposition catalysed by gold silicide dropletsElectronic supplementary information (ESI) available: (1) Electron beam induced SiO2 decomposition, (2) role of the electron beam on Au catalysed SiO2 decomposition, (3) chemical analysis of the gold layer using ToF-LEIS and XPS, (4) morphological analysis of the void using AFM, and (5) resuming SiO2 decomposition when supplied with Au NPs. See DOI: 10.1039/c5ra19472e

    Real-time observation of self-limiting SiO2/Si decomposition catalysed by gold silicide dropletsElectronic supplementary information (ESI) available: (1) Electron beam induced SiO2... by Bábor, Petr, Duda, Radek, Pol ák, Josef, Pr ša, Stanislav, Poto ek, Michal, Varga, Peter, echal, Jan, Šikola, Tomáš

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