Manufacturing Control and Optimization of SiGe(C) HBT Epitaxial Growth by Zhang, Nancy, Tan, Poh Cheng, Rodriquez, Angel, Prando, Greg, Nguyen, Chinh, Sinn, Craig, Fung, Min Su, Safran, Laura, Lehman, Gerold (Jerry), Gausepohl, Steve, Mase, Jerry, Bell, Nancy

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