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    Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties

    Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties by Bobzin, Kirsten, Bagcivan, Nazlim, Theiß, Sebastian, Trieschmann, Jan, Brugnara, Ricardo Henrique, Preissing, Sven, Hecimovic, Ante

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