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Search Results - Profijt, Harald
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Radical recombination sensor based on dual probe thermopile heat flux sensors
by
Velthuis, Johannes F. M.
,
Storm, Arnold
,
van Kampen, Maarten
,
van der Horst, Ruud
,
Profijt, Harald B.
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Fundamentals of Ge1−xSnx and SiyGe1−x-ySnx RPCVD epitaxy
by
Margetis, Joe
,
Mosleh, Aboozar
,
Ghetmiri, Seyed Amir
,
Al-Kabi, Sattar
,
Dou, Wei
,
Du, Wei
,
Bhargava, Nupur
,
Yu, Shui-Qing
,
Profijt, Harald
,
Kohen, David
,
Loo, Roger
,
Vohra, Anurag
,
Tolle, John
Published in
Materials science in semiconductor processing
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(Invited) Selective Epitaxial Growth of High-P Si:P for Source/Drain Formation in Advanced Si nFETs
by
Rosseel, Erik
,
Dhayalan, Sathish Kumar
,
Hikavyy, Andriy Yakovitch
,
Loo, Roger
,
Profijt, Harald Benjamin
,
Kohen, David
,
Kubicek, Stefan
,
Chiarella, Thomas
,
Yu, Hao
,
Horiguchi, Naoto
,
Mocuta, Dan
,
Barla, Kathy
,
Thean, Aaron
,
Bartlett, Gregory
,
Margetis, Joe
,
Bhargava, Nupur
,
Tolle, John
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Characterization of Epitaxial Si:C:P and Si:P Layers for Source/Drain Formation in Advanced Bulk FinFETs
by
Rosseel, Erik
,
Profijt, Harald Benjamin
,
Hikavyy, Andriy Yakovitch
,
Tolle, John
,
Kubicek, Stefan
,
Mannaert, Geert
,
L'abbe, Caroline
,
Wostyn, Kurt
,
Horiguchi, Naoto
,
Clarysse, Trudo
,
Parmentier, Brigitte
,
Dhayalan, Sathishkumar
,
Bender, Hugo
,
Maes, Jan Willem
,
Mehta, Sandeep
,
Loo, Roger
Published in
ECS transactions
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Ion Bombardment during Plasma-Assisted Atomic Layer Deposition
by
Profijt, Harald Benjamin
,
Kessels, W.M.M.
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Conference Proceeding
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Stable diamagnetic self-levitation of a micro-magnet by improvement of its magnetic gradients
by
Profijt, H.B.
,
Pigot, C.
,
Reyne, G.
,
Grechishkin, R.M.
,
Cugat, O.
Published in
Journal of magnetism and magnetic materials
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Fundamentals of Ge 1−x Sn x and Si y Ge 1−x-y Sn x RPCVD epitaxy
by
Margetis, Joe
,
Mosleh, Aboozar
,
Ghetmiri, Seyed Amir
,
Al-Kabi, Sattar
,
Dou, Wei
,
Du, Wei
,
Bhargava, Nupur
,
Yu, Shui-Qing
,
Profijt, Harald
,
Kohen, David
,
Loo, Roger
,
Vohra, Anurag
,
Tolle, John
Published in
Materials science in semiconductor processing
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Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
by
Potts, Stephen Ernest
,
Profijt, Harald Benjamin
,
Roelofs, Robin
,
Kessels, W.M.M.
Published in
ECS transactions
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The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
by
Profijt, Harald B.
,
Kudlacek, Pavel
,
Van de Sanden, M. C. M.
,
Kessels, W. M. M.
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