Search Results - Putero-Vuaroqueaux, Magali

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  1. 1
    Characterization of optics and masks for the EUV lithography

    Characterization of optics and masks for the EUV lithography by Paret, Valérie, Boher, Pierre, Geyl, Roland, Vidal, Bernard, Putero-Vuaroqueaux, Magali, Quesnel, Etienne, Yves Robic, Jean

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  2. 2
    A comparative study of the interfacial roughness correlation and propagation in Mo/Si multilayers deposited using RF-magnetron sputtering on silicon, ule and zerodur substrates

    A comparative study of the interfacial roughness correlation and propagation in Mo/Si multilayers deposited using RF-magnetron sputtering on silicon, ule and zerodur substrates by Putero-Vuaroqueaux, M, Faïk, H, Vidal, B

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  3. 3
    Low misfit systems as tools for understanding dislocation relaxation mechanisms in semiconducting heteroepitaxial films

    Low misfit systems as tools for understanding dislocation relaxation mechanisms in semiconducting heteroepitaxial films by Pichaud, B, Burle, N, Putero-Vuaroqueaux, M, Curtil, C

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  4. 4
    Extreme-ultraviolet multilayer mirrors deposited using radio-frequency-magnetron sputtering: the influence of self-bias voltage on reflectivity and roughness

    Extreme-ultraviolet multilayer mirrors deposited using radio-frequency-magnetron sputtering: the influence of self-bias voltage on reflectivity and roughness by Putero-Vuaroqueaux, M, Vidal, B

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  5. 5
    Metastability in the Matthews?Blakeslee mechanism for semiconductor film relaxation

    Metastability in the Matthews?Blakeslee mechanism for semiconductor film relaxation by Putero-Vuaroqueaux, M., Burle, N., Pichaud, B.

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