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A Study on the Effects of Release Area on the Quality Factor of Contour-Mode Resonators by Laser Doppler Vibrometry
by
Gibson, Brian
,
Qalandar, Kamala
,
Cassella, Cristian
,
Piazza, Gianluca
,
Foster, Kimberly L.
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IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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Analysis of the impact of release area on the quality factor of contour-mode resonators by laser Doppler vibrometry
by
Gibson, Brian
,
Qalandar, Kamala
,
Turner, Kimberly
,
Cassella, Cristian
,
Piazza, Gianluca
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Ieee Transactions On Ultrasonics, Ferroelectrics, And Frequency Control
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Aluminum Nitride
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Iii-V Semiconductor Materials
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Anchor Loss
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Contour-Mode Resonators
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Laser Doppler Vibrometry
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