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Search Results - Rachdi, Lazhar
Search Results - Rachdi, Lazhar
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The effects of carbon incorporation on the refractive index of PECVD silicon oxide layers
by
Torda, Benjamin
,
Rachdi, Lazhar
,
Mohamed Okasha Mohamed Okasha, Asmaa
,
Saint-Cast, Pierre
,
Hofmann, Marc
Published in
AIP advances
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Use of optical emission spectroscopy to predict silicon nitride layer properties
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Rachdi, Lazhar
,
Hofmann, Marc
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Vacuum
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Optical emission spectroscopy diagnostics for plasma parameters investigation in a Duo-Plasmaline surface-wave sustained discharge
by
Rachdi, Lazhar
,
Sushkov, Vladimir
,
Hofmann, Marc
Published in
Spectrochimica acta. Part B: Atomic spectroscopy
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A plasma chemistry model for H2/SiH4 mixtures used in PECVD processes
by
Sushkov, Vladimir
,
Rachdi, Lazhar
,
Hofmann, Marc
Published in
Physica scripta
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A plasma chemistry model for H 2 /SiH 4 mixtures used in PECVD processes
by
Sushkov, Vladimir
,
Rachdi, Lazhar
,
Hofmann, Marc
Published in
Physica scripta
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Insights into the Hydrogen‐Related Mechanism behind Defect Formation during Light‐ and Elevated‐Temperature‐Induced Degradation
by
Hammann, Benjamin
,
Rachdi, Lazhar
,
Kwapil, Wolfram
,
Schindler, Florian
,
Schubert, Martin C.
Published in
Physica status solidi. PSS-RRL. Rapid research letters
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Identification of the LeTID defect formation as a hydrogen-related dissociation process
by
Hammann, Benjamin
,
Rachdi, Lazhar
,
Kwapil, Wolfram
,
Schindler, Florian
,
Schubert, Martin C.
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