Search Results - Rachlin, V.I.

  • Showing 1 - 1 results of 1
Refine Results
  1. 1
    SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors

    SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors by Smirnova, T.P., Badalian, A.M., Yakovkina, L.V., Kaichev, V.V., Bukhtiyarov, V.I., Shmakov, A.N., Asanov, I.P., Rachlin, V.I., Fomina, A.N.

    Published in Thin solid films
    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:

Search Tools: