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Formation of the Al3Si metastable phase in Al-Si films obtained by ion-beam sputtering according to experimental and theoretical data
by
Terekhov, V.A.
,
Domashevskaya, E.P.
,
Kurganskii, S.I.
,
Nesterov, D.N.
,
Barkov, K.A.
,
Radina, V.R.
,
Velichko, K.E.
,
Zanin, I.E.
,
Sitnikov, A.V.
,
Agapov, B.L.
Published in
Thin solid films
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Thin Solid Films
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Al3Si
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Aluminum-Silicon
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Density Functional Theory
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Materials Science
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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Metastable Phase
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Physical Sciences
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Physics
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Physics, Applied
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Physics, Condensed Matter
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Science & Technology
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Technology
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Thin Film
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Ultrasoft X-Ray Emission Spectroscopy
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