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Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
by
Smiljani, Mil e M
,
Lazi, arko
,
Rafajilovi, Milena Rašlji
,
Zobenica, Katarina Cvetanovi
,
Milinkovi, Evgenija
,
Filipovi, Ana
Published in
Journal of micromechanics and microengineering
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Journal Of Micromechanics And Microengineering
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Engineering
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Engineering, Electrical & Electronic
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Instruments & Instrumentation
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Microchannels
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Nanoscience & Nanotechnology
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Physical Sciences
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Science & Technology - Other Topics
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Silicon
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Tmah
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Wet Etching
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Y Bifurcation
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Institute Of Physics Iopscience Extra
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