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Insight Into N/PBTI Mechanisms in Sub-1-nm-EOT Devices
by
Moonju Cho
,
Jae-Duk Lee
,
Aoulaiche, M.
,
Kaczer, B.
,
Roussel, P.
,
Kauerauf, T.
,
Degraeve, R.
,
Franco, J.
,
Ragnarsson, L.
,
Groeseneken, G.
Published in
IEEE transactions on electron devices
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Extreme Scaled Gate Dielectrics By Using ALD HfO 2 /SrTiO 3 Composite Structures
by
Pierreux, Dieter
,
Machkaoutsan, Vladimir
,
Tois, Eva
,
Swerts, Johan
,
Schram, Tom
,
Adelmann, Christoph
,
Van Elshocht, S.
,
Popovici, Mihaela I.
,
Conard, Thierry
,
Tseng, Joshua
,
Ragnarsson, Lars-Aåke
,
Maes, Jan W.
Published in
ECS transactions
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Impact of Hf-Precursor Choice on Scaling and Performance of High-k Gate Dielectrics
by
Maes, Jan Willem
,
Fedorenko, Yanina
,
Delabie, Annelies
,
Ragnarsson, Lars-Aåke
,
Swerts, Johan
,
Nyns, Laura
,
Van Elshocht, Sven
,
Wang, Changgong
,
Wilk, Glen
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AVD and MOCVD TaCN-based Films for Gate Metal Applications on High k Gate Dielectrics
by
Karim, Zia
,
Barbar, Ghassan
,
Boissière, Olivier
,
Lehnen, Peer
,
Lohe, Christoph
,
Seidel, Tom
,
Adelmann, Christoph
,
Conard, Thierry
,
O'Sullivan, Barry
,
Ragnarsson, Lars-Aåke
,
Schram, Tom
,
Van Elshocht, Sven
,
De Gendt, Stefan
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1/f noise analysis of replacement metal gate bulk p-type fin field effect transistor
by
Woo Lee, Jae
,
ju Cho, Moon
,
Simoen, Eddy
,
Ritzenthaler, Romain
,
Togo, Mitsuhiro
,
Boccardi, Guillaume
,
Mitard, Jerome
,
Ragnarsson, Lars-Åke
,
Chiarella, Thomas
,
Veloso, Anabela
,
Horiguchi, Naoto
,
Thean, Aaron
,
Groeseneken, Guido
Published in
Applied physics letters
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ALD La-Based Oxides for Vt-Tuning in High-K/Metal Gate Stacks
by
Swerts, Johan
,
Fedorenko, Yanina
,
Maes, Jan Willem
,
Tois, Eva
,
Delabie, Annelies
,
Ragnarsson, Lars-Aåke
,
Yu, HongYu
,
Nyns, Laura
,
Adelmann, Christoph
,
Van Elshocht, Sven
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Atomic Layer Deposition of HfO2 on (100) and (110) Oriented Silicon Surfaces
by
Nyns, Laura
,
Ragnarsson, Lars-Aåke
,
Hall, Lindsey
,
Delabie, Annelies
,
Heyns, Marc
,
Van Elshocht, Sven
,
Vinckier, Chris
,
Zimmerman, Paul
,
De Gendt, Stefan
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Atomic Layer Deposition of Hafnium Based Gate Dielectric Layers for CMOS Applications
by
Delabie, Annelies
,
Nyns, Laura
,
Bellenger, Florence
,
Caymax, Matty
,
Conard, Thierry
,
Franquet, Alexis
,
Houssa, Michel
,
Lin, D.
,
Meuris, Marc
,
Ragnarsson, Lars-Aåke
,
Sioncke, Sonja
,
Swerts, Johan
,
Fedorenko, Yanina
,
Maes, Jan Willem
,
Van Elshocht, Sven
,
De Gendt, Stefan
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Interface Trap Characterization of a 5.8- hbox rm AA EOT p-MOSFET Using High-Frequency On-Chip Ring Oscillator Charge Pumping Technique
by
Cho, Moonju
,
Kaczer, Ben
,
Aoulaiche, Marc
,
Degraeve, Robin
,
Roussel, Philippe
,
Franco, Jacopo
,
Kauerauf, Thomas
,
Ragnarsson, Lars Aake
,
Hoffmann, Thomas Y
,
Groeseneken, Guido
Published in
IEEE transactions on electron devices
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Advanced PBTI reliability with 0.69 nm EOT GdHfO gate dielectric
by
Cho, Moonju
,
Aoulaiche, Marc
,
Degraeve, Robin
,
Kaczer, Ben
,
Kauerauf, Thomas
,
Ragnarsson, Lars-Åke
,
Adelmann, Christoph
,
Elshocht, Sven Van
,
Hoffmann, Thomas Y.
,
Groeseneken, Guido
Published in
Solid-state electronics
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Study of nitrogen impact on V sub(FB)-EOT roll-off by varying interfacial SiO sub(2) thickness
by
Cho, Moonju
,
Akheyar, Amal
,
Aoulaiche, Marc
,
Degraeve, Robin
,
Ragnarsson, Lars-Aake
,
Tseng, Joshua
,
Hoffmann, Thomas Y
,
Groeseneken, Guido
Published in
Solid-state electronics
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Oxide thickness- and bias-dependence of postmetallization annealing of interface states in metal-oxide-silicon diodes
by
RAGNARSSON, L.-A
,
LUNDGREN, P
,
OVUKA, Z
,
ANDERSSON, M. O
Published in
Journal of the Electrochemical Society
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