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MEMS fluid density sensor based on oscillating piezoresistive microcantilever
by
Guiming Zhang
,
Rahman-Hebitul
,
Libo Zhao
,
Zhuangde Jiang
,
Longqi Xu
,
Jiuhong Wang
,
Zhigang Liu
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Conference Proceeding
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A fluid viscosity sensor with resonant trapezoidal micro cantilever
by
Longqi Xu
,
Guiming Zhang
,
Libo Zhao
,
Yulong Zhao
,
Zhuangde Jiang
,
Rahman-Hebitul
,
Hongyan Wang
,
Zhigang Liu
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Conference Proceedings
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Mems
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Micromechanical Devices
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Resonant Frequency
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Density Measurement
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Density Sensor
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Fluids
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Microcantilever
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Piezoresistive
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Q-Factor
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Quality Factor
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Sensitivity
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Silicon
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Software
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Temperature Measurement
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Temperature Sensors
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Trapezoidal Micro Cantilever
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Viscosity
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Viscosity Sensor
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Ieee Electronic Library (Iel) Conference Proceedings
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