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Synthesis of AlN by reactive sputtering
by
Randriamora, F
,
Bruyère, J.C
,
Deneuville, A
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
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Highly textured hexagonal AlN films deposited at low temperature by reactive cathodic sputerring
by
Brunet, F.
,
Randriamora, F.
,
Deneuville, A.
,
Germi, P.
,
Anterion, B.
,
Pernet, M.
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
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Highly textured hexagonal AlN films deposited at low temperature by reactive cathodic sputtering
by
BRUNET, F
,
RANDRIAMORA, F
,
DENEUVILLE, A
,
GERMI, P
,
ANTERION, B
,
PERNET, M
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Materials Science & Engineering. B, Solid-State Materials For Advanced Technology
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Materials Science
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Physics
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Exact Sciences And Technology
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Materials Science, Multidisciplinary
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Physical Sciences
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Physics, Condensed Matter
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Science & Technology
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Technology
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Aln Films
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Aln Synthesis
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Condensed Matter: Electronic Structure, Electrical, Magnetic, And Optical Properties
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Deposition By Sputtering
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Deposition Temperature
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Iii-V Semiconductors
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Optical Properties Of Specific Thin Films
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Reactive Cathodic Sputtering
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Reactive Sputtering
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Sciencedirect (Online Service)
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Sciencedirect Journals
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Backfile Package - Engineering And Technology [Yen]
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Elsevier Sd Backfile Materials Science
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