Search Results - Rang Roh, Hae

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  1. 1
    Plasma Etching Endpoint Detection in the Presence of Chamber Variations Through Nonlinear Manifold Learning and Density-Based Clustering

    Plasma Etching Endpoint Detection in the Presence of Chamber Variations Through Nonlinear Manifold Learning and Density-Based Clustering by Sun Kim, Chae, Rang Roh, Hae, Lee, Yongseok, Park, Taekyoon, Lee, Chanmin, Min Lee, Jong

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  2. 2
    Improvement of Plasma Etching Endpoint Detection with Data-driven Wavelength Selection and Gaussian Mixture Model

    Improvement of Plasma Etching Endpoint Detection with Data-driven Wavelength Selection and Gaussian Mixture Model by Kim, Chae Sun, Lee, Hye Ji, Roh, Hae Rang, Park, Taekyoon, Lee, Yongseok, Han, Jewoo, Kwon, Sungun, Lee, Chanmin, Sun, Jongwoo, Yoon, Kukhan, Lee, Jong Min

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  3. 3
    TabNet-based Self-supervised Fault Diagnosis in Multivariate Time-series Process Data without Labels

    TabNet-based Self-supervised Fault Diagnosis in Multivariate Time-series Process Data without Labels by Roh, Hae Rang, Lee, Jong Min

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  4. 4
    TabNet-based Self-supervised Fault Diagnosis in Multivariate Time-series Process Data without Labels⁎⁎This work was financially supported by Samsung Electronics Co., Ltd

    TabNet-based Self-supervised Fault Diagnosis in Multivariate Time-series Process Data without Labels⁎⁎This work was financially supported by Samsung Electronics Co., Ltd by Roh, Hae Rang, Lee, Jong Min

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