Demonstration of a single use microsystem valve for high gas pressure applications by Bejhed, Johan, Rangsten, Pelle, Köhler, Johan

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Miniature X-ray Source--Development of a Prototype by Ribbing, Carolina, Strid, Niklas, Pelle Rangsten, Tiren, Jonas

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Miniaturization of components and systems for space using MEMS-technology by Grönland, Tor-Arne, Rangsten, Pelle, Nese, Martin, Lang, Martin

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Diamond microstructures for optical micro electromechanical systems by Björkman, H., Rangsten, P., Hjort, K.

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Diamond membrane based structures for miniature X-ray sources by Ribbing, Carolina, Rangsten, Pelle, Hjort, Klas

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Diamond replicas from microstructured silicon masters by Björkman, H., Rangsten, P., Hollman, P., Hjort, K.

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Designed abrasive diamond surfaces by Gåhlin, Rickard, Björkman, Henrik, Rangsten, Pelle, Jacobson, Staffan

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Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation by Rangsten, Pelle, Hedlund, Christer, Katardjiev, Ilia V, Bäcklund, Ylva

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Quartz-to-quartz direct bonding by RANGSTEN, P, VALLIN, O, HERMANSSON, K, BÄCKLUND, Y

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Designed abrasive diamond surfaces by Gåhlin, Rickard, Bjorkman, Henrik, Rangsten, Pelle, Jacobson, Staffan

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Electrostatically excited diaphragm driven as a loudspeaker by Rangsten, P., Smith, L., Rosengren, L., Hök, B.

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Decreasing the optical path length in an optoelectronic module using silicon micromachining by Richard, Åse, Rangsten, Pelle, Strandman, Carola, Bäcklund, Ylva

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A system for passive implantable pressure sensors by Rosengren, Lars, Rangsten, Pelle, Bäcklund, Ylva, Hök, Bertil, Svedbergh, Björn, Selén, Göran

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