Search Results - Rathmell, R.D.

  • Showing 1 - 10 results of 10
Refine Results
  1. 1
    Beam energy purity in the Eaton NV-8200P ion implanter

    Beam energy purity in the Eaton NV-8200P ion implanter by Kamenitsa, Dennis E., Rathmell, R.D.

    Get full text
    Items that this one cites
    Article
    Save to List
    Saved in:
  2. 2
    Indium implantation process performance on the 8250/sub HT

    Indium implantation process performance on the 8250/sub HT by Luckman, G., Rathmell, R.D.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  3. 3
    Developments in small electrostatic accelerators (invited)

    Developments in small electrostatic accelerators (invited) by Rathmell, Robert D.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  4. 4
    Rejection of P/sup +/ contamination in P/sup ++/ implants on the Eaton 8250

    Rejection of P/sup +/ contamination in P/sup ++/ implants on the Eaton 8250 by Rathmell, R.D., King, M.L., Kamenitsa, D.E., Rathmell, M.A.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  5. 5
    Precision halo control with antimony and indium on Axcelis medium current ion implanters

    Precision halo control with antimony and indium on Axcelis medium current ion implanters by Luckman, G., Harris, M., Rathmell, R.D., Kopalidis, P., Ray, A.M., Sato, F., Sano, M.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  6. 6
    Beam parallelism in the 8250 medium current implanter

    Beam parallelism in the 8250 medium current implanter by Rathmell, R.D., Kamenitsa, D.E., King, M.L., Ray, A.M.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  7. 7
    Metals contamination reduction on the NV-8200P

    Metals contamination reduction on the NV-8200P by Rathmell, R.D., Brune, A., Kamenitsa, D.E., Seiler, D.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  8. 8
    Process performance for Axcelis MC3 300 mm implanter

    Process performance for Axcelis MC3 300 mm implanter by Rathmell, R.D., Ray, A.M., Sato, F., Godfrey, C.J.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  9. 9
    A technique for determining beam parallelism on a medium current implanter using the Therma-Wave Therma-Probe

    A technique for determining beam parallelism on a medium current implanter using the Therma-Wave Therma-Probe by Kamenitsa, D.E., Rathmell, R.D., McCoy, W.R., Lillian, P.K., King, M.L., Simonton, R.B.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  10. 10
    Modifications to improve lifetime of the ELS ion source

    Modifications to improve lifetime of the ELS ion source by Rathmeli, R.D., Hsieh, T.J., Trueira, F.R.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:

Search Tools: