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ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes
by
Mayrhofer, P. M.
,
Rehlendt, C.
,
Fischeneder, M.
,
Kucera, M.
,
Wistrela, E.
,
Bittner, A.
,
Schmid, U.
Published in
Journal of microelectromechanical systems
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Journal Of Microelectromechanical Systems
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Aluminum Nitride
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Cantilever
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Electrodes
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Energy Harvesting
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