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A 64-Mb embedded FRAM utilizing a 130-nm 5LM Cu/FSG logic process
by
McAdams, H.P.
,
Acklin, R.
,
Blake, T.
,
Xiao-Hong Du
,
Eliason, J.
,
Fong, J.
,
Kraus, W.F.
,
Liu, D.
,
Madan, S.
,
Moise, T.
,
Natarajan, S.
,
Ning Qian
,
Yunchen Qiu
,
Remack, K.A.
,
Rodriguez, J.
,
Roscher, J.
,
Seshadri, A.
,
Summerfelt, S.R.
Published in
IEEE journal of solid-state circuits
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Integration and bit distribution of production-worthy FRAM embedded with 130nm CMOS logic
by
Udayakumar, K.R.
,
Boku, K.
,
Remack, K.A.
,
Rodriguez, J.
,
Aggarwal, S.
,
Celii, F.G.
,
Martin, J.S.
,
Matz, L.
,
Summerfelt, S.R.
,
Moise, T.S.
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Ieee Journal Of Solid-State Circuits
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Ferroelectric Films
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Ferroelectric Materials
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Nonvolatile Memory
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Random Access Memory
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Voltage
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1T1C
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Bit Distribution
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Capacitors
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Circuits
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Cmos Logic Circuits
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Cmos Process
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Copper
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Cost Function
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Density
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Electrodes
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Embedded Fram
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Engineering
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Engineering, Electrical & Electronic
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Ferroelectric
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Ferroelectric Memory
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