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Effect of annealing in oxygen atmosphere on morphological and electrical properties of iridium and ruthenium thin films prepared by liquid delivery MOCVD
by
Lisker, Marco
,
Hur’yeva, Tetyana
,
Ritterhaus, Yves
,
Burte, Edmund P.
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Surface & coatings technology
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Iridium Electrodes for Ferroelectric Capacitors Deposited by Liquid-Delivery MOCVD and PVD
by
Lisker, Marco
,
Ritterhaus, Yves
,
Hur'yeva, Tetyana
,
Burte, Edmund
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Surface & Coatings Technology
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Annealing Effect
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Chemical Vapor Deposition
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Cross-Disciplinary Physics: Materials Science; Rheology
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Exact Sciences And Technology
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Field Emission Microscopy
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Iridium
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Liquid Delivery Metalorganic Cvd
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Materials Science
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Materials Science, Coatings & Films
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Physical Sciences
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Physics
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Physics, Applied
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Ruthenium
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Science & Technology
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Technology
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X-Ray Diffraction
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Sciencedirect (Online Service)
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Sciencedirect Journals
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Iopscience Extra
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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