Search Results - Roetz, Hagen

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    SDVSRM - a new SSRM based technique featuring dynamically adjusted, scanner synchronized sample voltages for measurement of actively operated devices

    SDVSRM - a new SSRM based technique featuring dynamically adjusted, scanner synchronized sample voltages for measurement of actively operated devices by Doering, Stefan, Wachowiak, Andre, Roetz, Hagen, Eckl, Stefan, Mikolajick, Thomas

    Published in Ultramicroscopy
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  2. 2
    Polycrystalline silicon gate originated CMOS device failure investigated by Scanning Spreading Resistance Microscopy

    Polycrystalline silicon gate originated CMOS device failure investigated by Scanning Spreading Resistance Microscopy by Doering, Stefan, Wachowiak, Andre, Rochel, Markus, Nowak, Christian, Hoffmann, Marko, Winkler, Uwe, Richter, Mirco, Roetz, Hagen, Eckl, Stefan, Mikolajick, Thomas

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    Scanning Spreading Resistance Microscopy analysis of locally blocked implant sites

    Scanning Spreading Resistance Microscopy analysis of locally blocked implant sites by Doering, Stefan, Wachowiak, Andre, Winkler, Uwe, Richter, Matthias, Goehler, Jens, Roetz, Hagen, Eckl, Stefan, Mikolajick, Thomas

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