Search Results - Rokitski, Slava

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    Big lasers, tiny circuits

    Big lasers, tiny circuits by Rokitski, Slava

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  2. 2
    Improving lithography pattern fidelity and line-edge roughness by reducing laser speckle

    Improving lithography pattern fidelity and line-edge roughness by reducing laser speckle by Kritsun, Oleg, Lalovic, Ivan, Rokitski, Slava, Partlo, Bill, La Fontaine, Bruno, Farrar, Nigel, Levinson, Harry

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