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Novel 3D modeling methods for virtual fabrication and EDA compatible design of MEMS via parametric libraries
by
Schröpfer, Gerold
,
Lorenz, Gunar
,
Rouvillois, Stéphane
,
Breit, Stephen
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Journal of micromechanics and microengineering
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A Novel Modelling Methodology for MEMS with IC Applied to a DLP Mirror Array
by
Lorenz, Gunar
,
Rouvillois, Stephane
,
Chianetta, Jean-Francois
,
Schröpfer, Gerold
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