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Feature‐Scale Fluid‐Based Erosion Modeling for Chemical‐Mechanical Polishing
by
Runnels, Scott R.
Published in
Journal of the Electrochemical Society
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Tribology Analysis of Chemical‐Mechanical Polishing
by
Runnels, Scott R.
,
Eyman, L. Michael
Published in
Journal of the Electrochemical Society
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Advanced experimental and computational tools for robust evaluation of on-chip interconnect reliability
by
Runnels, S.R.
,
Page, R.A.
,
Enright, M.P.
,
Millwater, H.R.
Published in
IEEE transactions on semiconductor manufacturing
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Modelling tool for chemical-mechanical polishing design and evaluation
by
Runnels, S.R.
,
Kim, I.
,
Schleuter, J.
,
Karlsrud, C.
,
Desai, M.
Published in
IEEE transactions on semiconductor manufacturing
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SIMULATION OF FLUID–STRUCTURE INTERACTION USING PATCHED-OVERSET GRIDS
by
FREITAS, C.J.
,
RUNNELS, S.R.
Published in
Journal of fluids and structures
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A DOMAIN-DECOMPOSITION STRATEGY FOR FINITE-ELEMENT SIMULATION OF PHASE CHANGE
by
Runnels, S. R.
,
Carey, G. F.
Published in
Numerical heat transfer. Part B, Fundamentals
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