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Anisotropic stress observation of 4H‐SiC trench metal‐oxide semiconductor field‐effect transistor test structures by scanning near‐field optical Raman microscope
by
Yoshikawa, Masanobu
,
Murakami, Masataka
,
Ushida, Tomoyuki
,
Samejima, Junichiro
,
Mitsuzawa, Kana
,
Matoba, Nobuhiro
,
Lim, Minwho
,
Rusch, Oleg
,
Rommel, Mathias
Published in
Journal of Raman spectroscopy
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Highly Efficient Floating Field Rings for SiC Power Electronic Devices - A Systematic Experimental Study
by
Rusch, Oleg
,
Moult, Jonathan
,
Erlbacher, Tobias
,
Corcoran, Yunji L.
,
Broderick, Lirong Z.
,
Tong, Tong
Published in
Key engineering materials
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A Modeling of 4H-SiC Super-Junction MOSFETs with Filtered High Energy Implantation
by
Kupfer, Barbara
,
Koo, Sang Mo
,
Förthner, Julietta
,
Byun, Dong Wook
,
Ehrensberger, Kevin
,
Shin, Hoon Kyu
,
Oertel, Susanne
,
Rusch, Oleg
,
Lim, Minwho
,
Beuer, Susanne
,
Csato, Constantin
,
Kim, Seongjun
,
Erlbacher, Tobias
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Key engineering materials
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Journal Title
Key Engineering Materials
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Journal Of Raman Spectroscopy
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Subjects
Mosfets
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Silicon Carbide
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4H‐Sic
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Anisotropic Stress
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Anisotropy
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Breakdown Voltage
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Charge Compensation
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Depth Profiling
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Design
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Efficiency
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Electric Potential
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Energy Filter
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Epitaxial Growth
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Experimental Study
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Figure Of Merit
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Finite Element Method
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Floating Field Rings
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Guard Rings
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High Energy Implantation
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Ion Implantation
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Scientific.net Journals
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Wiley-Blackwell Journals (Backfile Content)
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Wiley Online Library Journals Frontfile Complete
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Wiley-Blackwell Read & Publish Collection
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