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Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source
by
Sønsteby, Henrik H
,
Killi, Veronica A-L K
,
Rykkje, Linn M
,
Bickford, Justin R
,
Martin, Eric G
,
Hoffman, Robert C
,
Nilsen, Ola
Published in
Dalton transactions : an international journal of inorganic chemistry
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Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O 3 as the oxygen source
by
Sønsteby, Henrik H
,
Killi, Veronica A-L K
,
Rykkje, Linn M
,
Bickford, Justin R
,
Martin, Eric G
,
Hoffman, Robert C
,
Nilsen, Ola
Published in
Dalton transactions : an international journal of inorganic chemistry
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Dalton Transactions : An International Journal Of Inorganic Chemistry
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Royal Society Of Chemistry:jisc Collections:royal Society Of Chemistry Read And Publish 2022-2024 (Reading List)
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Nora - Norwegian Open Research Archives
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Royal Society Of Chemistry: Jisc Collections: Journals Archive 1841-2007 (2019-2023)
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