Search Results - SEERVELD, J. L

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    Improved polycrystalline silicon sheet resistance by rapid thermal annealing prior and subsequent to ion implantation

    Improved polycrystalline silicon sheet resistance by rapid thermal annealing prior and subsequent to ion implantation by WILSON, S. R, GREGORY, R. B, PAULSON, W. M, KRAUSE, S. J, LEAVITT, J. A, MCINTYRE, L. C. JR, SEERVELD, J. L, STOSS, P

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