Search Results - SHIM, Kew-Chan

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    Bottom-up filling of submicrometer features in catalyst-enhanced chemical vapor deposition of copper

    Bottom-up filling of submicrometer features in catalyst-enhanced chemical vapor deposition of copper by SHIM, Kew-Chan, LEE, Hyun-Bae, KWON, Oh-Kyum, PARK, Hyung-Sang, KOH, Wonyong, KANG, Sang-Won

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