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Design, Fabrication, and Testing of Silicon-integrated Li-ion Secondary Micro Batteries with Interdigital Electrodes
by
Hoeppner, K
,
Ferch, M
,
Froebe, A
,
Gernhardt, R
,
Hahn, R
,
Mackowiak, P
,
Mukhopadhyay, B
,
Roder, S
,
Saalhofen, I
,
Lang, K-D
Published in
Journal of physics. Conference series
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