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    Magnetic films for electromagnetic actuation in MEMS switches

    Magnetic films for electromagnetic actuation in MEMS switches by de Oliveira Hansen, Roana, Mátéfi-Tempfli, Mária, Safonovs, Romans, Adam, Jost, Chemnitz, Steffen, Reimer, Tim, Wagner, Bernhard, Benecke, Wolfgang, Mátéfi-Tempfli, Stefan

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