Search Results - Sakaguchi, Masatugu

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    Microwave discharge plasma production with resonant cavity for EUV mask inspection tool

    Microwave discharge plasma production with resonant cavity for EUV mask inspection tool by Tashima, Saya, Ohnishi, Masami, Hugrass, Waheed, Sugimoto, Keita, Sakaguchi, Masatugu, Osawa, Hodaka, Nishimura, Hiroaki, Matsukuma, Hiraku

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