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    Structural Properties and Oxidation Resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx Multilayered Films Deposited by Magnetron Sputtering Technique

    Structural Properties and Oxidation Resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx Multilayered Films Deposited by Magnetron Sputtering Technique by Saladukhin, Ihar, Abadias, Gregory, Uglov, Vladimir, Zlotski, Sergey, Janse van Vuuren, Arno, Herman O’Connell, Jacques

    Published in Coatings (Basel)
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