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The effect of methane dose and post annealing treatment on the formation of nano b-SiC buried layer in the silicon
by
Dibaji, H
,
Larijani, M M
,
Novinrooz, A
,
Salehkootahi, M
,
Afzalzadeh, R
,
Noroozian, Sh
Published in
Surface & coatings technology
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The effect of methane dose and post annealing treatment on the formation of nano β-SiC buried layer in the silicon
by
Dibaji, H.
,
Larijani, M.M.
,
Novinrooz, A.
,
Salehkootahi, M.
,
Afzalzadeh, R.
,
Noroozian, Sh
Published in
Surface & coatings technology
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Surface & Coatings Technology
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Cross-Disciplinary Physics: Materials Science; Rheology
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Diffusion
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Exact Sciences And Technology
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Ftir
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Implantation
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Materials Science
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Materials Science, Coatings & Films
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Physics
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Physics, Applied
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Surface Treatments
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Sciencedirect Journals
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Elsevier:jisc Collections:elsevier Read And Publish Agreement 2022-2024:Freedom Collection (Reading List)
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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