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Fabrication of Relaxer-Based Piezoelectric Energy Harvesters Using a Sacrificial Poly-Si Seeding Layer
by
Fuentes-Fernandez, E. M. A.
,
Salomon-Preciado, A. M.
,
Gnade, B. E.
,
Quevedo-Lopez, M. A.
,
Shah, P.
,
Alshareef, H. N.
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Journal Of Electronic Materials
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