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Capacitive Accelerometers with Beams Based on Alternated Segments of Different Widths
by
Tecpoyotl-Torres, Margarita
,
Vargas-Chable, Pedro
,
Sandoval-Reyes, Josue Osvaldo
,
Rodriguez-Fuentes, Sahiril Fernanda
,
Cabello-Ruiz, Ramon
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Actuators
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