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CBVD grown HfO2 on TiN for high-precision MIM capacitor
by
Rani, Rashmi
,
Maudez, William
,
Sayal, Rajat
,
Rai, Radheshyam
,
Kumar, Sanjeev
,
Shamim, Md Kashif
,
Wagner, Estelle
,
Sharma, Seema
,
Benvenuti, Giacomo
Published in
Physica. B, Condensed matter
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Physica. B, Condensed Matter
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Chemical Beam Vapor Deposition
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Combinatorial
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Hfo
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Hfo2
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Mim
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