Search Results - Scheckler, E.W.

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  1. 1
    Algorithms for simulation of three-dimensional etching

    Algorithms for simulation of three-dimensional etching by Toh, K.K.H., Neureuther, A.R., Scheckler, E.W.

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  2. 2
    Models and algorithms for three-dimensional topography simulation with SAMPLE-3D

    Models and algorithms for three-dimensional topography simulation with SAMPLE-3D by Scheckler, E.W., Neureuther, A.R.

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  3. 3
    An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification

    An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification by Scheckler, E.W., Tam, N.N., Pfau, A.K., Neureuther, A.R.

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  4. 4
    A utility-based integrated system for process simulation

    A utility-based integrated system for process simulation by Scheckler, E.W., Wong, A.S., Wang, R.K., Chin, G., Camagna, J.R., Neureuther, A.R., Dutton, R.W.

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  5. 5
    Resist roughness limits in EUV lithography for 1 G to 16 G DRAMs

    Resist roughness limits in EUV lithography for 1 G to 16 G DRAMs by Scheckler, E.W., Ogawa, T., Yamanashi, H., Soga, T., Ito, M.

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  6. 6
    Material Representations And Algorithms For Nanometer-scale Lithography Simulation

    Material Representations And Algorithms For Nanometer-scale Lithography Simulation by Scheckler, E.W., Ogawa, T., Shukuri, S., Takeda, E.

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  7. 7
    Coupling Models and Algorithms for 3D Topography Simulation: Plasma Etching, lon Milling and Deposition in SAMPLE-3D

    Coupling Models and Algorithms for 3D Topography Simulation: Plasma Etching, lon Milling and Deposition in SAMPLE-3D by Scheckler, E.W., Neureuther, A.R.

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  8. 8
    An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation

    An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation by Helmsen, J.J., Scheckler, E.W., Neureuther, A.R., Sequin, C.H.

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  9. 9
    Simulated profiles from the layout-design interface in X (SIMPL-DIX)

    Simulated profiles from the layout-design interface in X (SIMPL-DIX) by Wu, H.C., Wong, A.S., Koh, Y.L., Scheckler, E.W., Neureuther, A.R.

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