Search Results - Schlischka, Marvin

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    Machine learning enhanced electron beam lithography of photonic nanostructures

    Machine learning enhanced electron beam lithography of photonic nanostructures by Donges, Jan, Schlischka, Marvin, Shih, Ching-Wen, Pengerla, Monica, Limame, Imad, Schall, Johannes, Bremer, Lucas, Rodt, Sven, Reitzenstein, Stephan

    Published in Nanoscale
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    Machine learning enhanced in situ electron beam lithography of photonic nanostructures

    Machine learning enhanced in situ electron beam lithography of photonic nanostructures by Donges, Jan, Schlischka, Marvin, Shih, Ching-Wen, Pengerla, Monica, Limame, Imad, Schall, Johannes, Bremer, Lucas, Rodt, Sven, Reitzenstein, Stephan

    Published in Nanoscale
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