Search Results - Schwarzband, Ishai

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    Inline detection for FinFET gate poly footing using e-Tilt metrology

    Inline detection for FinFET gate poly footing using e-Tilt metrology by Zhang, Xiaoxiao, Karakoy, Mert, Wu, Kejia, Chen, Zhuangfei, Ge, Zhenhua, Krishnan, Navi, Siany, Amit, Levi, Shimon, Schwarzband, Ishai, Kris, Roman

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    Roughness characterization of gate all around Silicon Nano Wire fabrication

    Roughness characterization of gate all around Silicon Nano Wire fabrication by Levi, Shimon, Schwarzband, I., Kris, R., Adan, O.

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