Search Results - Schwille, Matthias C

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    Simulation approach of atomic layer deposition in large 3D structures

    Simulation approach of atomic layer deposition in large 3D structures by Schwille, Matthias C, Barth, Jonas, Schössler, Timo, Schön, Florian, Bartha, Johann W, Oettel, Martin

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    Temperature dependence of the sticking coefficients of bis-diethyl aminosilane and trimethylaluminum in atomic layer deposition

    Temperature dependence of the sticking coefficients of bis-diethyl aminosilane and trimethylaluminum in atomic layer deposition by Schwille, Matthias C., Schössler, Timo, Schön, Florian, Oettel, Martin, Bartha, Johann W.

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    Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures

    Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures by Schwille, Matthias C., Schössler, Timo, Barth, Jonas, Knaut, Martin, Schön, Florian, Höchst, Arnim, Oettel, Martin, Bartha, Johann W.

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