Search Results - Schwinge, Caroline

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  1. 1
    300 mm CMOS-compatible fabrication of Ru2Si3 sub-50 nm thin films and characterization

    300 mm CMOS-compatible fabrication of Ru2Si3 sub-50 nm thin films and characterization by Hertel, Johannes, Schwinge, Caroline, Gerlich, Lukas, Wagner-Reetz, Maik

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  2. 2
    Thermoelectric transport properties of Si, SiGe, and silicide CMOS-compatible thin films

    Thermoelectric transport properties of Si, SiGe, and silicide CMOS-compatible thin films by Schwinge, Caroline, Hoffmann, Raik, Hertel, Johannes, Wislicenus, Marcus, Gerlich, Lukas, Völklein, Friedemann, Gerlach, Gerald, Wagner-Reetz, Maik

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  3. 3
    Optimization of LPCVD phosphorous-doped SiGe thin films for CMOS-compatible thermoelectric applications

    Optimization of LPCVD phosphorous-doped SiGe thin films for CMOS-compatible thermoelectric applications by Schwinge, Caroline, Kühnel, Kati, Emara, Jennifer, Roy, Lisa, Biedermann, Kati, Weinreich, Wenke, Kolodinski, Sabine, Wiatr, Maciej, Gerlach, Gerald, Wagner-Reetz, Maik

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