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The role of focused ion beams in physical failure analysis (ICs)
by
Matusiewicz, G.R.
,
Kirch, S.J.
,
Seeley, V.J.
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Conference Proceeding
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Conference Proceedings
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Electron Beams
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Electrostatics
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Engineering
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Engineering, Electrical & Electronic
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Failure Analysis
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Focusing
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Instruments & Instrumentation
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Insulation
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Integrated Circuit Technology
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Ion Beams
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Metal-Insulator Structures
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Physical Sciences
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Physics
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Physics, Applied
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Ieee Electronic Library (Iel) Conference Proceedings
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