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Optimization of cleaning process in semiconductor gas delivery system by computational fluid dynamics simulation
by
Seo, Ireh
,
Jeon, Rakyoung
,
Yoon, Tae-ung
,
Lee, Chang-Ha
Published in
Process safety and environmental protection
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Advanced cartridge design for a gas respiratory protection system using experiments, CFD simulation and virtual reality
by
Jeon, Rakyoung
,
Kim, Shin Hyuk
,
Ko, Kwangjun
,
Kwon, Kihyun
,
Park, Myungkyu
,
Seo, Ireh
,
Oh, Min
,
Lee, Chang-Ha
Published in
Journal of cleaner production
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Journal Of Cleaner Production
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Process Safety And Environmental Protection
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Cfd
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Engineering
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Engineering, Environmental
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Science & Technology
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Technology
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Adsorption
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Cleaning Efficiency
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Engineering, Chemical
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Environmental Sciences
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Environmental Sciences & Ecology
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Gas Respirator Cartridge
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Green & Sustainable Science & Technology
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Life Sciences & Biomedicine
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Optimal Design
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Purging Methods
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Science & Technology - Other Topics
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Semiconductor Manufacturing
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Specialty Gas System
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Virtual Reality
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Sciencedirect Additional Titles
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Sciencedirect Freedom Collection 2022-2024
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Elsevier Sd Backfile Environmental Sciences
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